CART–BPN approach for estimating cycle time in wafer fabrication

标题

作者

关键词

Cycle time estimation, Classification and regression tree (CART), Back propagation network (BPN), Wafer fabrication

出版物

Volume 6, Issue 1, Pages 57-67

出版商

Springer Nature

发表日期

2014-11-04

DOI

10.1007/s12652-014-0251-x

参考文献

查看 3 条相关文献

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