Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures

出版年份 2014 全文链接

标题

作者

关键词

Deposition, FZO thin films, Secondary ion mass spectrometry

出版物

Volume 9, Issue 1, Pages 97

出版商

Springer Nature

发表日期

2014-02-27

DOI

10.1186/1556-276x-9-97

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