Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition

标题
Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer deposition
作者
关键词
Aluminum-doped zinc oxide, Zinc aluminate, Atomic layer deposition, X-ray diffraction, Photoluminescence, 81.15.Gh, 72.20.Jv, 78.20.Ci
出版物
Nanoscale Research Letters
Volume 8, Issue 1, Pages 144
出版商
Springer Nature
发表日期
2013-03-28
DOI
10.1186/1556-276x-8-144

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