期刊
NANOSCALE RESEARCH LETTERS
卷 8, 期 -, 页码 -出版社
SPRINGEROPEN
DOI: 10.1186/1556-276X-8-84
关键词
Amorphous Si; Hydrogen; Annealing; IR spectroscopy; Blister
资金
- CNR (Italy) [MTA 1102]
- MTA (Hungary) [MTA 1102]
- OTKA [K-67969, NF 10132, CK80126]
Differently hydrogenated radio frequency-sputtered a-Si layers have been studied by infrared (IR) spectroscopy as a function of the annealing time at 350A degrees C with the aim to get a deeper understanding of the origin of blisters previously observed by us in a-Si/a-Ge multilayers prepared under the same conditions as the ones applied to the present a-Si layers. The H content varied between 10.8 and 17.6 at.% as measured by elastic recoil detection analysis. IR spectroscopy showed that the concentration of the clustered (Si-H) (n) groups and of the (Si-H-2) (n) (n a parts per thousand yen 1) polymers increased at the expense of the Si-H mono-hydrides with increasing annealing time, suggesting that there is a corresponding increase of the volume of micro-voids whose walls are assumed from literature to be decorated by the clustered mono-hydride groups and polymers. At the same time, an increase in the size of surface blisters was observed. Also, with increasing annealing time, the total concentration of bonded H of any type decreases, indicating that H is partially released from its bonds to Si. It is argued that the H released from the (Si-H) (n) complexes and polymers at the microvoid surfaces form molecular H-2 inside the voids, whose size increases upon annealing because of the thermal expansion of the H-2 gas, eventually producing plastic surface deformation in the shape of blisters.
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