期刊
NANOSCALE RESEARCH LETTERS
卷 8, 期 -, 页码 -出版社
SPRINGEROPEN
DOI: 10.1186/1556-276X-8-24
关键词
Multi-walled carbon nanotubes; CNT; Conductive AFM; Atomic force microscopy; Interconnect system
资金
- Deutsche Forschungsgemeinschaft (DFG) [GRK 1215]
We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.
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