Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching

标题
Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
作者
关键词
Maskless, Nanofabrication, Friction-induced selective etching, Quartz, 81.16.Rf, 68.37.Ps
出版物
Nanoscale Research Letters
Volume 8, Issue 1, Pages 140
出版商
Springer Nature
发表日期
2013-03-27
DOI
10.1186/1556-276x-8-140

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