Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 6, Issue 1, Pages 518

出版商

Springer Nature

发表日期

2011-09-03

DOI

10.1186/1556-276x-6-518

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