期刊
MICROMACHINES
卷 4, 期 1, 页码 116-127出版社
MDPI
DOI: 10.3390/mi4010116
关键词
flow sensor; electrostatic spring softening; hair; cricket; biomimetics
类别
资金
- STW/NWO
We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsivity by up to 80% for flow signals at frequencies below the sensor's resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
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