4.6 Article

Enhanced Liquid Metal Micro Droplet Generation by Pneumatic Actuation Based on the StarJet Method

期刊

MICROMACHINES
卷 4, 期 1, 页码 49-66

出版社

MDPI
DOI: 10.3390/mi4010049

关键词

StarJet; metal droplets; 3D-printing; rapid prototyping; droplet generator; microparticle; soldering; bumping

资金

  1. German Federal Ministry of Education and Research [FKZ 02PO2872]

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We present a novel pneumatic actuation system for generation of liquid metal droplets according to the so-called StarJet method. In contrast to our previous work, the performance of the device has been significantly improved: the maximum droplet generation frequency in continuous mode has been increased to f(max) = 11 kHz (formerly f(max) = 4 kHz). In addition, the droplet diameter has been reduced to 60 mu m. Therefore, a new fabrication process for the silicon nozzle chips has been developed enabling the production of smaller nozzle chips with higher surface quality. The size of the metal reservoir has been increased to hold up to 22 mL liquid metal and the performance and durability of the actuator has been improved by using stainless steel and a second pneumatic connection to control the sheath flow. Experimental results are presented regarding the characterization of the droplet generation, as well as printed metal structures.

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