期刊
MICROMACHINES
卷 3, 期 1, 页码 62-77出版社
MDPI
DOI: 10.3390/mi3010062
关键词
SU-8; PDMS; microfluidics; optical waveguide; integration; devices
Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 mu m and 12 mu m in fluorescent detection and counting tests using 2.5 and 6 mu m beads-show CVs of 9%-13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%-15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.
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