期刊
MICROMACHINES
卷 3, 期 2, 页码 315-324出版社
MDPI AG
DOI: 10.3390/mi3020315
关键词
tactile sensor; capacitive sensor; poly-urethane; elastomer; thin film
类别
资金
- JSPS (Japan Society for the Promotion of Science) KAKENHI [22310083]
- Matching Fund Subsidy MEXT (Ministry of Education, Culture, Sport, Science, and Technology, Japan) [2010-2014 (S1001048)]
- Grants-in-Aid for Scientific Research [22310083] Funding Source: KAKEN
A novel capacitive tactile sensor using a polyurethane thin film is proposed in this paper. In previous studies, capacitive tactile sensors generally had an air gap between two electrodes in order to enhance the sensitivity. In this study, there is only polyurethane thin film and no air gap between the electrodes. The sensitivity of this sensor is higher than the previous capacitive tactile sensors because the polyurethane is a fairly flexible elastomer and the film is very thin (about 1 mu m). The polyurethane film is formed by spin-coating and etched back from 6 mu m to 1 mu m using 48% sulfuric acid. As a result of evaluation, the sensitivity of the developed sensor (diameter is 1 mm) is 1.3 pF/Pa (800 pF/N considering the sensing area). Young's modulus of the thin polyurethane film was estimated to be 20 kPa.
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