Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels

标题
Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
作者
关键词
-
出版物
Micromachines
Volume 3, Issue 2, Pages 270-278
出版商
MDPI AG
发表日期
2012-03-28
DOI
10.3390/mi3020270

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