4.6 Article

Plasma enhanced atomic layer deposition of Fe2O3 thin films

期刊

JOURNAL OF MATERIALS CHEMISTRY A
卷 2, 期 27, 页码 10662-10667

出版社

ROYAL SOC CHEMISTRY
DOI: 10.1039/c4ta01486c

关键词

-

资金

  1. European Research Council [239865]
  2. Flemish Research Foundation (FWO)
  3. Special Research Fund BOF of Ghent University [GOA 01G01513]
  4. European Research Council (ERC) [239865] Funding Source: European Research Council (ERC)

向作者/读者索取更多资源

Atomic layer deposition of Fe2O3 is generally performed at temperatures above 350 degrees C. In this work, Fe2O3 thin films were deposited by remote plasma enhanced atomic layer deposition using tertiary butyl ferrocene (TBF) and O-2 plasma in a broad temperature range starting from 150 to 400 degrees C. A maximum growth rate of 1.2 angstrom per cycle was achieved between 300 and 350 degrees C. Below 300 degrees C, the saturated growth per cycle was found to depend on the temperature of the sample. All the deposited films were pure with no significant amount of carbon contamination. Films deposited at 250 degrees C and above were crystalline with an alpha-Fe2O3 crystal structure, while the low temperature films were crystallized by a post-deposition annealing in He. Annealing in H-2 induced the formation of metallic iron.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

Article Chemistry, Inorganic & Nuclear

Atomic layer deposition of ternary ruthenates by combining metalorganic precursors with RuO4 as the co-reactant

Matthias M. Minjauw, Ji-Yu Feng, Timo Sajavaara, Christophe Detavernier, Jolien Dendooven

Summary: This work presents the use of ruthenium tetroxide (RuO4) as a co-reactant in atomic layer deposition (ALD), achieving ALD of ruthenium-containing metal oxides and demonstrating self-limiting surface reactions. Different processes result in films with varied metal ratios and impurities, all of which are amorphous.

DALTON TRANSACTIONS (2022)

Article Chemistry, Physical

Aligning time-resolved kinetics (TAP) and surface spectroscopy (AP-XPS) for a more comprehensive understanding of ALD-derived 2D and 3D model catalysts

Evgeniy A. Redekop, Hilde Poelman, Matthias Filez, Ranjith K. Ramachandran, Jolien Dendooven, Christophe Detavernier, Guy B. Marin, Unni Olsbye, Vladimir V. Galvita

Summary: The spectro-kinetic characterization of complex catalytic materials is essential for understanding and improving various chemical technologies. This study proposes a method that combines temporal analysis of products pulse-response kinetic experiments with ambient pressure X-ray photoelectron spectroscopy to obtain a comprehensive understanding of catalytic reactions. The results show that this tandem methodology is effective in monitoring coke deposition and providing quantitative kinetic descriptors.

FARADAY DISCUSSIONS (2022)

Article Chemistry, Physical

Selective Vapor-Phase Doping of Pt Nanoparticles into Phase-Controlled Nanoalloys

Nithin Poonkottil, Ranjith K. Ramachandran, Eduardo Solano, Nadadur Veeraraghavan Srinath, Ji-Yu Feng, Andreas Werbrouck, Michiel Van Daele, Matthias Filez, Matthias M. Minjauw, Hilde Poelman, Alessandro Coati, Christophe Detavernier, Jolien Dendooven

Summary: This study presents a flexible strategy for the deposition of phase-controlled bimetallic nanoparticles (BMNPs) by vapor-phase titration of a secondary metal to a pre-deposited monometallic nanoparticle (NP) host. The method allows for precise control over the structure and composition of the BMNPs through substrate temperature control and the addition of hydrogen gas. The approach provides a single-step, selective vapor-phase conversion of the monometallic NPs into phase-controlled BMNPs with potential applications in catalysis.

JOURNAL OF PHYSICAL CHEMISTRY C (2022)

Article Chemistry, Physical

Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate

Andreas Werbrouck, Felix Mattelaer, Arpan Dhara, Mikko Nisula, Matthias Minjauw, Frans Munnik, Jolien Dendooven, Christophe Detavernier

Summary: This work reports on the atomic layer deposition process combining lithium hexamethyl disilazide (LiHMDS) and trimethylphosphate (TMP), and studies the impact of adding a trimethylaluminum (TMA) pulse to this process. The interaction between TMA and TMP plays a key role in this process, and the addition of TMA leads to higher growth and structural changes in the deposited layer. The amorphous mix of Li4P2O7 and Li3PO4 in the films grown with TMA improves the conductive properties of the material, making it potentially useful for modifying electrode-electrolyte interfaces in lithium-ion batteries.

JOURNAL OF MATERIALS CHEMISTRY A (2022)

Article Nanoscience & Nanotechnology

Titanium Carboxylate Molecular Layer Deposited Hybrid Films as Protective Coatings for Lithium-Ion Batteries

Sofie S. T. Vandenbroucke, Lowie Henderick, Louis L. De Taeye, Jin Li, Karolien Jans, Philippe M. Vereecken, Jolien Dendooven, Christophe Detavernier

Summary: This study reports the deposition of titanium carboxylate thin films via molecular layer deposition (MLD) on lithium-ion battery cathodes. The films have good performance in both protecting the cathodes and accommodating volume changes of the electrode.

ACS APPLIED MATERIALS & INTERFACES (2022)

Article Chemistry, Applied

In vacuo XPS investigation of surface engineering for lithium metal anodes with plasma treatment

Bo Zhao, Jin Li, Maxime Guillaume, Jolien Dendooven, Christophe Detavernier

Summary: The study reveals that the pristine Li surface is naturally covered with an oxidized layer, which can be efficiently removed by plasma treatments to obtain different surface compositions like metallic Li, Li2O, and Li3N. Among these, the Li3N coated Li electrode shows superior stability in symmetric Li metal batteries.

JOURNAL OF ENERGY CHEMISTRY (2022)

Review Physics, Applied

Atomic layer deposition of metal phosphates

Lowie Henderick, Arpan Dhara, Andreas Werbrouck, Jolien Dendooven, Christophe Detavernier

Summary: Due to their unique properties, metal phosphate coatings are widely used in various applications. Atomic layer deposition is a precise method for producing high-quality coatings. This article discusses different strategies and mechanisms of atomic layer deposition for phosphate materials, and summarizes the applications of metal phosphates in energy storage and other emerging technologies.

APPLIED PHYSICS REVIEWS (2022)

Article Chemistry, Physical

Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties

Matthias Filez, Ji-Yu Feng, Matthias M. Minjauw, Eduardo Solano, Nithin Poonkottil, Michiel Van Daele, Ranjith K. Ramachandran, Chen Li, Sara Bals, Hilde Poelman, Christophe Detavernier, Jolien Dendooven

Summary: This paper introduces a new gas-phase sequence, ALD+, which combines multiple functionalities to tailor the properties of bimetallic thin films and nanoparticles, expanding upon traditional atomic layer deposition methods.

CHEMISTRY OF MATERIALS (2022)

Article Materials Science, Multidisciplinary

A combinatorial study of SiGeAsTe thin films for application as an Ovonic threshold switch selector

Wouter Devulder, Daniele Garbin, Sergiu Clima, Gabriele Luca Donadio, Andrea Fantini, Bogdan Govoreanu, Christophe Detavernier, Larry Chen, Michael Miller, Ludovic Goux, Sven Van Elshocht, Johan Swerts, Romain Delhougne, Gouri Sankar Kar

Summary: This paper investigates the thermal stability of a wide range of ternary and quaternary (Si)GeAsTe alloy thin films. The study shows that Si doping improves the thermal stability and capping the films with a W cap avoids material loss. An optimal chalcogenide composition of As50Te20Ge20Si10 is identified for electrical characterization.

THIN SOLID FILMS (2022)

Article Multidisciplinary Sciences

UV photonic integrated circuits for far-field structured illumination autofluorescence microscopy

Chupao Lin, Juan Santo Domingo Penaranda, Jolien Dendooven, Christophe Detavernier, David Schaubroeck, Nico Boon, Roel Baets, Nicolas Le Thomas

Summary: The authors developed a UV-compatible photonic integrated circuit for structured illumination microscopy on a conventional wide-field microscope. The photonic circuits, designed at a wavelength of 360 nm, enable super-resolved imaging with UV light and do not require modification of the traditional imaging protocol. As a biological application, the UV photonic chips revealed features that cannot be resolved using standard wide-field microscopy.

NATURE COMMUNICATIONS (2022)

Article Chemistry, Physical

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Nithin Poonkottil, Matthias M. Minjauw, Andreas Werbrouck, Stefano Checchia, Eduardo Solano, Mikko Nisula, Alexis Franquet, Christophe Detavernier, Jolien Dendooven

Summary: This study presents a low-temperature atomic layer deposition (ALD) process for ruthenium dioxide (RuO2) using a combination of inorganic precursor and alcohols. The process allows for linear growth with controlled growth rate. Various analyses confirm the composition and structure of the deposited material, revealing both amorphous and crystalline phases. The films also show conductivity and can be crystallized through thermal annealing. The proposed ALD reaction mechanism involves the reduction and reoxidation of the RuO2 surface by alcohols and RuO4, respectively.

CHEMISTRY OF MATERIALS (2022)

Article Nanoscience & Nanotechnology

Nanoporous Silica-Alumina Films Fabricated on Silicon Photonic Chips for Selective Ammonia Sensing

Yanlu Li, Claudio Bellani, Nebiyu Yebo, Jolien Dendooven, Jin Won Seo, Christophe Detavernier, Roel Baets, Johan A. Martens, Sreeprasanth Pulinthanathu Sree

Summary: This study demonstrates the integration of nanoporous silica-alumina films on silicon nanophotonic chips for selective NH3 detection. The reversible nature of the sensor is investigated in relation to preadsorbed water vapor.

ACS APPLIED NANO MATERIALS (2022)

Article Engineering, Electrical & Electronic

Effects of post metallization annealing on Al2O3 atomic layer deposition on n-GaN

Liad Tadmor, Enrico Brusaterra, Eldad Bahat Treidel, Frank Brunner, Nicole Bickel, Sofie S. T. Vandenbroucke, Christophe Detavernier, Joachim Wuerfl, Oliver Hilt

Summary: This work investigates the properties and robustness of post metallization annealed Al2O3 atomic layers on n-type GaN in terms of chemical, physical, and electrical aspects. The study demonstrates a gate-first process flow with subsequent ohmic contact formation at temperatures up to 600 degrees C using planar metal insulator capacitors. The results show no new bonds or crystallization in the Al2O3 layer due to annealing, but degradation is observed at 600 degrees C. The annealing temperature affects the oxide depletion and deep depletion capacitances, resulting in a reduction of the flat band voltage to zero.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2023)

Article Chemistry, Physical

Enhanced moisture sorption through regulated MIL-101(Cr) synthesis and its integration onto heat exchangers

Mei Gui Vanessa Wee, Amutha Chinnappan, Runxin Shang, Poh Seng Lee, Seeram Ramakrishna

Summary: Cooling processes, from residences to industries, require a lot of energy and are essential. This study introduces MIL-101(Cr), a new desiccant, to heat exchangers for more efficient cooling. By improving the synthesis method and using a special binder, the MIL-101(Cr)-coated heat exchanger shows improved water uptake capacity and lower regeneration temperature.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Synthesis of completely solvent-free biomedical waterborne polyurethane with excellent mechanical property retention and satisfactory water absorption

Ao Zhen, Guanyu Zhang, Ao Wang, Feng Luo, Jiehua Li, Hong Tan, Zhen Li

Summary: In this study, a solvent-free microemulsion method was used to synthesize waterborne polyurethane (WPU) material with high retention of mechanical properties and satisfactory water absorption rates. The material showed excellent biocompatibility and has broad application potential in the field of biomedicine.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Review Chemistry, Physical

Recent progress in eutectic gallium indium (EGaIn): surface modification and applications

Wensong Ge, Rui Wang, Xiaoyang Zhu, Houchao Zhang, Luanfa Sun, Fei Wang, Hongke Li, Zhenghao Li, Xinyi Du, Huangyu Chen, Fan Zhang, Huifa Shi, Huiqiang Hu, Yongming Xi, Jiankang He, Liang Hu, Hongbo Lan

Summary: This paper reviews the research on the surface tension of eutectic gallium-indium alloys (EGaIn) in the field of stretchable electronics. It covers the principles of oxide layer formation, factors influencing surface tension, and methods for surface modification of liquid metals. The paper also discusses the applications of EGaIn surface modification in different fields and highlights the challenges still faced and the future outlook.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Review Chemistry, Physical

Nature-inspired sustainable solar evaporators for seawater desalination

Xiang Song, Lianghao Jia, Zhengen Wei, Tao Xiang, Shaobing Zhou

Summary: This paper provides an overview of the application, preparation, and role of biomimetic structures in solar evaporators with improved evaporation rate and lifetime.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Synergistic carrier and phonon transport advance Ag dynamically-doped n-type PbTe thermoelectrics via Mn alloying

Wei Yuan, Qian Deng, Dong Pan, Xiang An, Canyang Zhao, Wenjun Su, Zhengmin He, Qiang Sun, Ran Ang

Summary: Optimizing the performance of n-type PbTe thermoelectric materials is crucial for practical applications. Dynamic doping has emerged as an effective method to improve the performance of n-type PbTe by optimizing the carrier concentration. This study demonstrates the significance of Mn alloying in enhancing the performance of Ag-doped n-type PbTe by creating a hierarchical structure to suppress thermal transport and improving the Seebeck coefficient.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Review Chemistry, Physical

Recent advances of bifunctional electrocatalysts and electrolyzers for overall seawater splitting

Xiaoyan Wang, Meiqi Geng, Shengjun Sun, Qian Xiang, Shiyuan Dong, Kai Dong, Yongchao Yao, Yan Wang, Yingchun Yang, Yongsong Luo, Dongdong Zheng, Qian Liu, Jianming Hu, Qian Wu, Xuping Sun, Bo Tang

Summary: This review provides a comprehensive analysis of the progress and challenges in the field of bifunctional electrocatalysts and efficient electrolyzers for seawater splitting. It summarizes recent advancements and proposes future perspectives for highly efficient bifunctional electrocatalysts and electrolyzers.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Sequence-dependent self-assembly of supramolecular nanofibers in periodic dynamic block copolymers

Jason K. Phong, Christopher B. Cooper, Lukas Michalek, Yangju Lin, Yuya Nishio, Yuran Shi, Huaxin Gong, Julian A. Vigil, Jan Ilavsky, Ivan Kuzmenko, Zhenan Bao

Summary: Dynamic block copolymers (DBCPs) combine the phase separation of traditional block copolymers with the supramolecular self-assembly of periodic dynamic polymers, resulting in the spontaneous self-assembly of high aspect ratio nanofibers with well-ordered PEG and PDMS domains. DBCPs with a periodic block sequence exhibit superior properties compared to those with a random sequence, including delayed onset of terminal flow and higher ionic conductivity values.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Moisture-triggered proton conductivity switching in metal-organic frameworks: role of coordinating solvents

Hong Kyu Lee, Yasaswini Oruganti, Jonghyeon Lee, Seunghee Han, Jihan Kim, Dohyun Moon, Min Kim, Dae-Woon Lim, Hoi Ri Moon

Summary: This study reports the moisture-triggered proton-conductivity switching behavior in Zn5FDC MOFs induced by the presence and absence of coordinating solvents, which illustrates the significant role of coordinating solvents in conductivity variation.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Spiro[fluorene-9,9′-xanthene]-based hole shuttle materials for effective defect passivation in perovskite solar cells

Bommaramoni Yadagiri, Sanjay Sandhu, Ashok Kumar Kaliamurthy, Francis Kwaku Asiam, Jongdeok Park, Appiagyei Ewusi Mensah, Jae-Joon Lee

Summary: The molecular engineering of the interface modulator between the perovskite and hole transporting material is crucial for achieving satisfactory performance and stability of perovskite solar cells. In this study, cruciform-shaped dual functional organic materials were employed as surface passivation and hole transporting interfacial layers in perovskite solar cells. The use of these materials significantly improved the power conversion efficiency of the solar cells.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Crystalline phase transition in as-synthesized pure silica zeolite RTH containing tetra-alkyl phosphonium as organic structure directing agent

Joaquin Martinez-Ortigosa, Reisel Millan, Jorge Simancas, Manuel Hernandez-Rodriguez, J. Alejandro Vidal-Moya, Jose L. Jorda, Charlotte Martineau-Corcos, Vincent Sarou-Kanian, Mercedes Boronat, Teresa Blasco, Fernando Rey

Summary: This study investigates the synthesis of all-silica RTH zeolites using triisopropyl(methyl)phosphonium as the organic SDA. The results show the formation of two distinct crystalline phases under different synthesis conditions, with fluoride bonding to different silicon sites. It demonstrates the possibility of controlling the placement of fluoride in RTH zeolites through synthesis conditions.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Heterostructured MoP/CoMoP2 embedded in an N, P-doped carbon matrix as a highly efficient cooperative catalyst for pH-universal overall water splitting

Luyao Zheng, Cong Liu, Wenbiao Zhang, Boxu Gao, Tianlan Yan, Yahong Zhang, Xiaoming Cao, Qingsheng Gao, Yi Tang

Summary: This study successfully improves the efficiency and stability of water splitting by constructing a heterostructured electrocatalyst. The catalyst shows extraordinary performance and could offer an effective approach for the sustainable production of hydrogen.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Lanthanide contraction effect on the alkaline hydrogen evolution and oxidation reactions activity in platinum-rare earth nanoalloys

Carlos A. Campos-Roldan, Raphael Chattot, Frederic Pailloux, Andrea Zitolo, Jacques Roziere, Deborah J. Jones, Sara Cavaliere

Summary: This study systematically evaluated the hydrogen evolution/oxidation reactions on a series of Pt-rare earth nanoalloys in alkaline media, and identified the effect of the lanthanide contraction. The experimental results revealed that the chemical nature of the rare earth modulates the adsorption and mobility of oxygenated-species, enhancing the kinetics of the reactions.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Correlating the structural transformation and properties of ZIF-67 during pyrolysis, towards electrocatalytic oxygen evolution

Sara Frank, Mads Folkjaer, Mads L. N. Nielsen, Melissa J. Marks, Henrik S. Jeppesen, Marcel Ceccato, Simon J. L. Billinge, Jacopo Catalano, Nina Lock

Summary: This study investigates the thermal decomposition of ZIF-67 and its correlation with structural evolution and electrocatalytic performance. The researchers used in situ X-ray absorption spectroscopy and total scattering techniques to analyze the process. They found that disorder emerges at lower temperatures and that extending the pyrolysis process can result in materials with superior electrochemical properties.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

SiO2 assisted Cu0-Cu+-NH2 composite interfaces for efficient CO2 electroreduction to C2+ products

Zi-Yang Zhang, Hao Tian, Han Jiao, Xin Wang, Lei Bian, Yuan Liu, Nithima Khaorapapong, Yusuke Yamauchi, Zhong-Li Wang

Summary: By constructing Cu-0-Cu+-NH2 composite interfaces with the assistance of SiO2, the electrochemical CO2 reduction reaction (CO2RR) achieves high Faraday efficiency and current density for C2+ production, improving the productivity of carbon cycle.

JOURNAL OF MATERIALS CHEMISTRY A (2024)

Article Chemistry, Physical

Electrochemically exfoliated covalent organic frameworks for improved photocatalytic hydrogen evolution

Ting Wang, Ruijuan Zhang, Pengda Zhai, Mingjie Li, Xinying Liu, Chaoxu Li

Summary: This study successfully exfoliated COFs using a simple electrochemical method, which resulted in improved photocatalytic performance for COFs and enriched the fabrication approach of COF exfoliation.

JOURNAL OF MATERIALS CHEMISTRY A (2024)