Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part I: Mechanical Design and Characterization

标题
Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part I: Mechanical Design and Characterization
作者
关键词
-
出版物
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2011-09-28
DOI
10.1109/tthz.2011.2165013

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