Deposition of High-Efficiency Microcrystalline Silicon Solar Cells Using SiF $_{\bf 4}$/H$_{\bf 2}$/Ar Mixtures

标题
Deposition of High-Efficiency Microcrystalline Silicon Solar Cells Using SiF $_{\bf 4}$/H$_{\bf 2}$/Ar Mixtures
作者
关键词
-
出版物
IEEE Journal of Photovoltaics
Volume 3, Issue 1, Pages 581-586
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2012-10-20
DOI
10.1109/jphotov.2012.2221683

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