Formation of a Bilayer of ALD-SiO2 and Sputtered Al2O3/ZrO2 Films on Polyethylene Terephthalate Substrates as a Moisture Barrier

标题
Formation of a Bilayer of ALD-SiO2 and Sputtered Al2O3/ZrO2 Films on Polyethylene Terephthalate Substrates as a Moisture Barrier
作者
关键词
-
出版物
ECS Solid State Letters
Volume 2, Issue 6, Pages R13-R15
出版商
The Electrochemical Society
发表日期
2013-03-14
DOI
10.1149/2.004306ssl

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