期刊
AIP ADVANCES
卷 2, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4723852
关键词
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资金
- Chinese National Foundation of Natural Science [61076084]
- Foundation of Natural Science, Fujian Province, China [2009J01267]
To improve the quality of ZnO thin film overgrown on Si(100) substrate at RT (room temperature), the Si(100) surface was pretreated with different methods. The influence of interface on the overgrown ZnO layers was investigated by atomic force microscopy, photoluminescence and X-ray diffraction. We found that the nitridation pretreatment could significantly improve the quality of RT ZnO thin film through two-fold effects: one was to buffer the big lattice mismatch and ease the stress resulted from heterojunction growth; the other was to balance the interface charge, block the symmetric inheritance from the cubic Si (100) substrate and thus restrain the formation of zincblende phase. Copyright 2012 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [http://dx.doi.org/10.1063/1.4723852]
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