Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 1, Issue 3, Pages 032136

出版商

AIP Publishing

发表日期

2011-08-15

DOI

10.1063/1.3628670

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