UV-Patterning of Ion Conducting Negative Tone Photoresists Using Azide-Functionalized Poly(Ionic Liquid)s

标题
UV-Patterning of Ion Conducting Negative Tone Photoresists Using Azide-Functionalized Poly(Ionic Liquid)s
作者
关键词
-
出版物
ACS Macro Letters
Volume 3, Issue 11, Pages 1187-1190
出版商
American Chemical Society (ACS)
发表日期
2014-10-31
DOI
10.1021/mz5005986

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