Coordination chemistry of titanium and zinc in Ti(1-x)Zn2xO2 (0 ≤ x ≤ 1) ultrathin films grown by DC reactive magnetron sputtering

XANES and RBS were used to explore the structural phase and composition transitions of ultrathin films with Ti(1-x)Zn2xO2 stoichiometries, from very low (similar to 0.5 at.%) to high (similar to 25 at.%) titanium content. In this way, the coordination chemistry of Ti4+ and Zn2+ cations was examined for a wide range of oxide compositions.