Formation of three-dimensional carbon microstructures via two-photon microfabrication and microtransfer molding

Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis

(2012) Varun Penmatsa et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Three-dimensional optical laser lithography beyond the diffraction limit

(2012) Joachim Fischer et al.   Laser & Photonics Reviews

Micro and nano patterning of carbon electrodes for bioMEMS

(2012) Swati Sharma et al.   Bioinspired Biomimetic and Nanobiomaterials

Carbon-Based Materials: Growth, Properties, MEMS/NEMS Technologies, and MEM/NEM Switches

(2011) Meiyong Liao et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

Three-Dimensional Molding Based on Microstereolithography Using Beta-Tricalcium Phosphate Slurry for the Production of Bioceramic Scaffolds

(2011) Takashi Torii et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

One-step maskless grayscale lithography for the fabrication of 3-dimensional structures in SU-8

(2010) Amritha Rammohan et al.   SENSORS AND ACTUATORS B-CHEMICAL

Replication of Three-Dimensional Rotary Micromechanism by Membrane-Assisted Transfer Molding

(2009) Shoji Maruo et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Optically driven micropump with a twin spiral microrotor

(2009) Shoji Maruo et al.   OPTICS EXPRESS

Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis

(2008) Jung A Lee et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Inverse Opal Carbons Derived from a Polymer Precursor as Electrode Materials for Electric Double-Layer Capacitors

(2008) Seiichiro Tabata et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Recent progress in multiphoton microfabrication

(2008) S. Maruo et al.   Laser & Photonics Reviews

Advances in 3D nano/microfabrication using two-photon initiated polymerization

(2008) Kwang-Sup Lee et al.   PROGRESS IN POLYMER SCIENCE