4.6 Article

Al/Si Nanopillars as Very Sensitive SERS Substrates

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MATERIALS
卷 11, 期 9, 页码 -

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MDPI
DOI: 10.3390/ma11091534

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SERS; sensors; aluminum; silicon

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In this paper, we present a fast fabrication of Al/Si nanopillars for an ultrasensitive SERS detection of chemical molecules. The fabrication process is only composed of two steps: use of a native oxide layer as a physical etch mask followed by evaporation of an aluminum layer. A random arrangement of well-defined Al/Si nanopillars is obtained on a large-area wafer of Si. A good uniformity of SERS signal is achieved on the whole wafer. Finally, we investigated experimentally the sensitivity of these Al/Si nanopillars for SERS sensing, and analytical enhancement factors in the range of 1.5 x 10(7) - 2.5 x 10(7) were found for the detection of thiophenol molecules. Additionally, 3D FDTD simulations were used to better understand optical properties of Al/Si nanopillars as well as the Raman enhancement.

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