Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers

出版年份 2012 全文链接

标题

Chemical Processing of Materials on Silicon: More Functionality, Smaller Features, and Larger Wafers

作者

关键词

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出版物

Annual Review of Chemical and Biomolecular Engineering

Volume 3, Issue 1, Pages 235-262

出版商

Annual Reviews

发表日期

2012-06-13

DOI

10.1146/annurev-chembioeng-062011-080958

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