期刊
IEEE PHOTONICS JOURNAL
卷 3, 期 1, 页码 123-129出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPHOT.2011.2108645
关键词
Engineered photonic nanostructures; subwavelength structures; gratings; waveguide devices
资金
- State of Texas Emerging Technology Fund
- Texas Instruments Distinguished University Chair in Nanoelectronics endowment
- National Science Foundation [ECCS-0925774]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [0925774] Funding Source: National Science Foundation
We present the fabrication and characterization of a guided-mode resonance-based high reflector operating in transverse-electric (TE) polarization. This reflector consists of a single periodic layer of amorphous silicon on a glass substrate. It is fabricated by silicon sputtering, holographic interference patterning, and dry etching. The measured reflectance exceeds 90% over a similar to 130-nm wavelength range with maximum reflectance of similar to 98% in a band centered at a similar to 1560-nm wavelength. The experimental spectrum approximates the theoretical spectral response of this fundamental minimal device.
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