Novel Electrical Characterization of Thin 3C-SiC Films on Si Substrates

标题
Novel Electrical Characterization of Thin 3C-SiC Films on Si Substrates
作者
关键词
-
出版物
Science of Advanced Materials
Volume 6, Issue 7, Pages 1542-1547
出版商
American Scientific Publishers
发表日期
2014-05-13
DOI
10.1166/sam.2014.1813

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