Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas

标题
Inductively Coupled Plasma Reactive Ion Etching of Magnetic Tunnel Junction Stacks in a CH3COOH/Ar Gas
作者
关键词
-
出版物
ECS Solid State Letters
Volume 4, Issue 10, Pages P77-P79
出版商
The Electrochemical Society
发表日期
2015-08-13
DOI
10.1149/2.0071510ssl

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