Advanced colloidal lithography for sub-100 nm lift-off structures

标题
Advanced colloidal lithography for sub-100 nm lift-off structures
作者
关键词
-
出版物
VACUUM
Volume 86, Issue 9, Pages 1232-1234
出版商
Elsevier BV
发表日期
2011-04-23
DOI
10.1016/j.vacuum.2011.04.009

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