Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films

标题
Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films
作者
关键词
-
出版物
VACUUM
Volume 86, Issue 8, Pages 1107-1112
出版商
Elsevier BV
发表日期
2011-10-24
DOI
10.1016/j.vacuum.2011.10.011

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