Reactive DC magnetron sputter deposited copper nitride nano-crystalline thin films: Growth and characterization

标题
Reactive DC magnetron sputter deposited copper nitride nano-crystalline thin films: Growth and characterization
作者
关键词
-
出版物
VACUUM
Volume 86, Issue 8, Pages 1067-1072
出版商
Elsevier BV
发表日期
2011-11-06
DOI
10.1016/j.vacuum.2011.09.001

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