Correlation between thermal properties and aluminum fractions in CrAlN layers deposited by PVD technique

出版年份 2010 全文链接

标题

Correlation between thermal properties and aluminum fractions in CrAlN layers deposited by PVD technique

作者

关键词

-

出版物

VACUUM

Volume 84, Issue 9, Pages 1067-1074

出版商

Elsevier BV

发表日期

2010-01-15

DOI

10.1016/j.vacuum.2010.01.011

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