rf-Magnetron sputter deposited ZrO2 dielectrics for metal–insulator–semiconductor capacitors

标题
rf-Magnetron sputter deposited ZrO2 dielectrics for metal–insulator–semiconductor capacitors
作者
关键词
-
出版物
VACUUM
Volume 82, Issue 12, Pages 1367-1370
出版商
Elsevier BV
发表日期
2008-04-09
DOI
10.1016/j.vacuum.2008.03.039

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