Optical and chemical characterization of thin TiNx films deposited by DC-magnetron sputtering

标题
Optical and chemical characterization of thin TiNx films deposited by DC-magnetron sputtering
作者
关键词
-
出版物
VACUUM
Volume 82, Issue 10, Pages 1115-1119
出版商
Elsevier BV
发表日期
2008-01-10
DOI
10.1016/j.vacuum.2008.01.028

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