Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen

出版年份 2008 全文链接

标题

Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen

作者

关键词

-

出版物

VACUUM

Volume 83, Issue 4, Pages 732-737

出版商

Elsevier BV

发表日期

2008-05-17

DOI

10.1016/j.vacuum.2008.05.011

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