Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD

标题
Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD
作者
关键词
-
出版物
VACUUM
Volume 83, Issue 3, Pages 622-624
出版商
Elsevier BV
发表日期
2008-04-19
DOI
10.1016/j.vacuum.2008.04.070

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