Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography

标题
Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography
作者
关键词
-
出版物
ULTRAMICROSCOPY
Volume 115, Issue -, Pages 7-13
出版商
Elsevier BV
发表日期
2012-02-10
DOI
10.1016/j.ultramic.2012.01.009

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