期刊
SURFACE AND INTERFACE ANALYSIS
卷 45, 期 11-12, 页码 1775-1780出版社
WILEY
DOI: 10.1002/sia.5321
关键词
Multifractal Analysis; Surface Morphology; Thin Films; AFM Image; Ion Fluence
资金
- UGC-CSIR
- DST
- DST/MoES/ISRO
The surface morphologies of CaF2 thin films prepared by electron beam evaporation technique were measured by atomic force microscopy. The films were bombarded by energetic ion beams of different fluences, which modified the surface morphology predominantly via the process of erosion. The dependence of the surface morphology on ion fluence was explored using multifractal analysis. It was found that the roughness of the film first decreased with ion fluence but increased at higher fluences. Copyright (c) 2013 John Wiley & Sons, Ltd.
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