XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer

标题
XPS and AFM characterization of aminosilanes with different numbers of bonding sites on a silicon wafer
作者
关键词
-
出版物
SURFACE AND INTERFACE ANALYSIS
Volume 45, Issue 11-12, Pages 1709-1713
出版商
Wiley
发表日期
2013-07-16
DOI
10.1002/sia.5311

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