Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

标题
Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution
作者
关键词
-
出版物
SURFACE AND INTERFACE ANALYSIS
Volume 44, Issue 2, Pages 208-218
出版商
Wiley
发表日期
2011-06-17
DOI
10.1002/sia.3798

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