Removal of Ar+ beam-induced damaged layers from polyimide surfaces with argon gas cluster ion beams

标题
Removal of Ar+ beam-induced damaged layers from polyimide surfaces with argon gas cluster ion beams
作者
关键词
-
出版物
SURFACE AND INTERFACE ANALYSIS
Volume 42, Issue 9, Pages 1453-1457
出版商
Wiley
发表日期
2010-07-26
DOI
10.1002/sia.3675

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