From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

出版年份 2010 全文链接

标题

From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality

作者

关键词

-

出版物

SURFACE AND INTERFACE ANALYSIS

Volume 43, Issue 1-2, Pages 479-483

出版商

Wiley

发表日期

2010-05-21

DOI

10.1002/sia.3468

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