期刊
SURFACE AND INTERFACE ANALYSIS
卷 43, 期 1-2, 页码 41-44出版社
WILEY-BLACKWELL
DOI: 10.1002/sia.3509
关键词
molecular depth profiling; 3D analysis; depth resolution; organic multilayer analysis
资金
- National Institutes of Health [EB002016-16]
- National Science Foundation [CHE-0908226]
- Department of Energy [DE-FG02-06ER15803]
- Direct For Mathematical & Physical Scien [0908226] Funding Source: National Science Foundation
- NATIONAL INSTITUTE OF BIOMEDICAL IMAGING AND BIOENGINEERING [R01EB002016] Funding Source: NIH RePORTER
A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C-60(+) cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method. Copyright (C) 2010 John Wiley & Sons, Ltd.
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