Ultra-thin SiO2on Si IX: absolute measurements of the amount of silicon oxide as a thickness of SiO2on Si

标题
Ultra-thin SiO2on Si IX: absolute measurements of the amount of silicon oxide as a thickness of SiO2on Si
作者
关键词
-
出版物
SURFACE AND INTERFACE ANALYSIS
Volume 41, Issue 5, Pages 430-439
出版商
Wiley
发表日期
2009-03-04
DOI
10.1002/sia.3045

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