The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD

标题
The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 254, Issue -, Pages 73-78
出版商
Elsevier BV
发表日期
2014-06-09
DOI
10.1016/j.surfcoat.2014.05.066

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