Influence of RF magnetron sputtering conditions on the properties of transparent conductive gallium-doped magnesium zinc oxide thin films

标题
Influence of RF magnetron sputtering conditions on the properties of transparent conductive gallium-doped magnesium zinc oxide thin films
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 231, Issue -, Pages 539-542
出版商
Elsevier BV
发表日期
2012-10-18
DOI
10.1016/j.surfcoat.2012.10.029

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