Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique

标题
Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 231, Issue -, Pages 131-134
出版商
Elsevier BV
发表日期
2012-01-14
DOI
10.1016/j.surfcoat.2012.01.014

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