Thermal stability and oxidation behavior of quaternary TiZrAlN magnetron sputtered thin films: Influence of the pristine microstructure

标题
Thermal stability and oxidation behavior of quaternary TiZrAlN magnetron sputtered thin films: Influence of the pristine microstructure
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 237, Issue -, Pages 187-195
出版商
Elsevier BV
发表日期
2013-08-02
DOI
10.1016/j.surfcoat.2013.07.055

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