Industrial-scale sputter deposition of Cr1−xAlxN coatings with 0.21≤x≤0.74 from segmented targets

标题
Industrial-scale sputter deposition of Cr1−xAlxN coatings with 0.21≤x≤0.74 from segmented targets
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 232, Issue -, Pages 303-310
出版商
Elsevier BV
发表日期
2013-05-23
DOI
10.1016/j.surfcoat.2013.05.022

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