Oxygen plasma etching of diamond-like carbon coated mold-die for micro-texturing

标题
Oxygen plasma etching of diamond-like carbon coated mold-die for micro-texturing
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 215, Issue -, Pages 364-368
出版商
Elsevier BV
发表日期
2012-11-06
DOI
10.1016/j.surfcoat.2012.07.095

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