Residual stress gradient analysis with GIXRD on ZrO2 thin films deposited by MOCVD

出版年份 2011 全文链接

标题

Residual stress gradient analysis with GIXRD on ZrO2 thin films deposited by MOCVD

作者

关键词

-

出版物

SURFACE & COATINGS TECHNOLOGY

Volume 206, Issue 2-3, Pages 405-410

出版商

Elsevier BV

发表日期

2011-07-25

DOI

10.1016/j.surfcoat.2011.07.036

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Protocol

Reagent

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