Transparent conductive characteristics of Ti:ITO films deposited by RF magnetron sputtering at low substrate temperature

标题
Transparent conductive characteristics of Ti:ITO films deposited by RF magnetron sputtering at low substrate temperature
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue -, Pages S210-S215
出版商
Elsevier BV
发表日期
2010-08-04
DOI
10.1016/j.surfcoat.2010.07.094

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